Developments in Metrology in Support of Nanotechnology

Nanotechnology emerges out of fundamental science through capability for accurate, repeatable and reproducible measurements on the nanoscale which allows scientists and engineers to accumulate knowledge. Understanding the measurement science is the first step towards development of new ideas. This paper describes some research initiatives which underpin the development of nanotechnology. Programs underway at the National Research Council of Canada include: development of metrological scanning-probe microscope instrumentation for dimensional calibration, materials characterization, development of artefacts designed specifically for dimensional calibration, investigation of metrology for application to soft materials and investigation of intrinsic length standards for realization of the SI metre at the nanoscale.