HFCVD 법으로 증착한 초미세 나노결정질 다이아몬드 박막의 구조적 특성 및 식각특성 연구

Ultrananocrystalline diamond (UNCD) exhibits unparalleled tribological, mechanical and physical properties such as very low friction coefficient, large Young's modulus, high thermal conductivity and wear resistance. UNCD has found application fields including tribological coating, electrochemical el...