An Implantation System for MeV-mA Ion-Beams

A combination of high current and high energy ion beams satisfies the requirements of new applications in ion implantation experiments. High energies in the MeV – range are already used; for large area applications and high dose implantations also mA – current capabilities are needed to keep irradiation times in realistic and economical limits. The status of a high current, high energy acceleration system is discussed, which consists of a bucket ion source, an electrostatic injection system, a Radio Frequency Quadrupole (RFQ) accelerator, and a Spiral Loaded Cavity (SLC).