Design a composite piezoelectric motor using face-shear and longitudinal resonance vibration

Abstract A new flexural-wave of a piezoelectric composite motor constructed with d 14 and d 13 is developed. The piezoelectric motor using dual d 14 mode is firstly designed with an output head located in the middle of the structure, which is able to produce two-way motion. However, it is found that the longitudinal deflection is not large enough to preserve appropriate contact with the slider and normal contact force. A composite structure of single-piece ceramic that combines the d 14 mode for mainly contributing face-shear deformation and the d 13 mode for generating additional longitudinal deflection is thus considered to build. Polarization method is introduced for the composite actuator. Characterization on the detected domain change by Piezoresponse Force Microscopy (PFM) verifies the sequentially poled ceramic workable. The degeneracy process is carried out by using the modal and harmonic analysis of ANSYS simulation to search for a suitable common driving frequency can generate desired deformation. Both analytical and experimental results are in a good agreement. Displacement and speed as well as force output are measured to examine the performance of both actuators. In comparison the dual d 14 actuator with the composite d 14  +  d 13 actuator on the condition of nearly same size, the latter one performs better for increasing the longitudinal deflection efficiently. Moreover, by adjusting the phase difference of the driving signal to each the d 14 and d 13 mode, various types of elliptical motion profile are gained, which provides more options for output performance.