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A process for preparing an SOI structure with a DRAM
A process for preparing an SOI structure with a DRAM
1992
Akihiko Ochiai
Makoto Hashimoto
Takeshi Matsushita
Machio Yamagishi
Hiroshi Sato
Muneharu Shimanoe
Keywords:
Silicon on insulator
Materials science
Electronic engineering
Dram
Optoelectronics
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