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Improving Pitch and Step Height Measurements Using the Calibrated Atomic Force Microscope
Improving Pitch and Step Height Measurements Using the Calibrated Atomic Force Microscope
1998
R Koning
Ronald G. Dixson
Joseph Fu
V W. Tsai
Keywords:
Non-contact atomic force microscopy
Atomic force microscopy
Analytical chemistry
Materials science
step height
Optics
Metrology
Correction
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