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Chemistry and Physics of Amorphous Silicon Device Production
Chemistry and Physics of Amorphous Silicon Device Production
2004
Wengang Zheng
P. Horvath
Alan Gallagher
Keywords:
Amorphous silicon
Amorphous solid
Semiconductor device
Thin film
Nanocrystalline silicon
Amorphous carbon
Inorganic chemistry
Particle deposition
Analytical chemistry
Materials science
Monocrystalline silicon
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