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Advanced doping profiles by selective epitaxy in n-type PERT cells
Advanced doping profiles by selective epitaxy in n-type PERT cells
2015
M. Récaman Payo
I. Kuzma-Filipek
Filip Duerinckx
Yuandong Li
Emanuele Cornagliotti
A. Uruena
Aashish Sharma
Loic Tous
Richard Russell
A. Hajjiah
Jozef Szlufcik
J. Poortmans
Keywords:
Doping
Epitaxy
Inorganic chemistry
Materials science
Analytical chemistry
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