GaN Distributed Bragg Reflector Cavity for Sensing Applications

S. Jia,E. D. Le Boulbar,K. Balram,Jon R Pugh,T. Wang,Duncan W. E. Allsopp,Philip A. Shields,Martin J Cryan

GaN Distributed Bragg Reflector Cavity for Sensing Applications

2018

S. Jia
E. D. Le Boulbar
K. Balram
Jon R Pugh
T. Wang
Duncan W. E. Allsopp
Philip A. Shields
Martin J Cryan

GaN grating couplers and a distributed Bragg reflector cavity are fabricated using displacement Talbot lithography on GaN-on-sapphire. Cavity resonances are simulated and measured for two devices with Q factors of ~200.

Keywords:

Q factor
Resonance
Lithography
Distributed Bragg reflector
Optics
Materials science
Grating
sensing applications

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