New concept of mass spectrometer based on arrays of resonating nanostructures

The aim of the project is to bring a proof of concept of a simplified mass spectrometer architecture using an ultra dense network of NEMS in association with elements of CMOS circuit as sensors in order to amplify the signal in situ and adress them individually. Since several years, Roukes' team at Caltech has demonstrated a mass spectrometry with a NEMS. In parallel, the CEA/LETI-MINATEC has developped a fabrication approach called VLSI of NEMS and an electromecanical simulation method of these elements The first objective of this thesis is to study the noise phenomenon currently limiting our mass resolution in order to reach 10 Da instead of current 1000 Da on ranges going from 10 Da to 1MDa. In a second step, the concept of NEMS-based mass spectrometry is validated by comparison a nanometric cluster spectra with those from a conventional time-of-flight mass spectrometer. Then, a frequency addressing technique is applied on an NEMS array to allow for quasi simultaneous tracking of 20 different resonators. Finally, the NEMS array is inserted in the nanocluster bench to measure 20 spectra in parallel and validate a first proof of concept.