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Change in ion sputtering coefficients of targets due to cross-dusting during simultaneous operation of two sputters
Change in ion sputtering coefficients of targets due to cross-dusting during simultaneous operation of two sputters
2020
O. D. Volpian
A. I. Kuzmichev
Yu A Obod
Keywords:
Materials science
Atomic physics
ion sputtering
Correction
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