In Situ Nanolithography with Sub-10 nm Resolution Realized by Thermally Assisted Spin-Casting of a Self-Assembling Polymer.

J. H. Lee, Dr. Y. Kim, S. R. Yang, J. M. Kim, S. Yim, Prof. Y. S. Jung Department of Materials Science and Engineering Korea Advanced Institute of Science and Technology (KAIST) 291 Daehak-ro , Yuseong-gu , Daejeon 305-701 Republic of Korea E-mail: ysjung@kaist.ac.kr J.-Y. Cho, Prof. H. Lee Department of Materials Science and Engineering Korea University 145 Anam-ro , Seongbuk-gu , Seoul 136-713 Republic of Korea E-mail: heonlee@korea.ac.kr