Collision-Free Structure Using Thin-Film Magnet For Electrostatic Energy Harvester

This paper proposes collision-free structure using NdFeB thin-film magnet for vibration energy harvesters. By using stripe shaped NdFeB magnet array on the Si MEMS structure, we finally obtained 3 mN of magnetic repulsive force on 8 × 8 mm2 specimen with 40 μm air-gap.