Technological modules for on-chip integration of sensors with electronics

Technological modules that are needed to fabricate sensors on CMOS wafers are discussed. None of the process steps of the CMOS technology are modified in order to guarantee that the electronics are not affected by the additional sensor process steps. The definition of standardized `add-on' sensor modules to the CMOS process of a foundry is intended to limit the development cost of smart sensors. The application of these modules to the fabrication of a CMOS multisensor chip is described.© (1998) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.