A Complete Coplanar Element Library in Commercially Available Foundry Process for Millimeter-wave Integrated Circuit Design

For use with a commercial GaAs foundry process, an exhaustive coplanar library for passive and active elements has been developed. The library includes all coplanar elements needed for MMIC design, such as transmission lines, air-bridges, bends, probing pads, T-junctions, coupled lines and lumped passive elements. For all of them, accurate and scalable frequency dependent models have been validated from on-wafer measurement up to 120 GHz, and implemented in the HP-MDS software. This resulted in a comprehensive and precise coplanar database for the commercial United Monolithic Semiconductors (UMS) low-noise and power PHEMT foundry processes.