Microplasma Generation in Low-Power Microwave Coplanar Waveguide (CPW) Structures*

Cold plasma is a critical technology in many application fields. However, plasma sources are typically very expensive, require either high-voltage pulses (in the range of 100s of Volts to kV) or high-power RF/microwave sources (in the range of 10s of Watts to MW). Therefore, plasma generation based on low-power and readily-available supplies is critical for many end-user applications.