Preparation process of high-efficiency solar cell

2012 
The invention discloses a preparation process of a high-efficiency solar cell. The preparation process comprises the following steps of: a, washing a silicon wafer, removing an affected layer and etching; b, putting the silicon wafer into a pipe type dispersion furnace and carrying out dispersion; c, removing phosphorosilicate glass on the dispersed silicon wafer and etching a surface dead layer; d, depositing a silicon nitride passivated antireflection layer on the surface of an emission electrode; e, forming a back electrode and a front electrode through screen printing or electroplating the front electrode; and f, sintering, testing and sorting. The preparation process of the high-efficiency solar cell combines advantages of two emission electrodes to guarantee that under the condition that a square resistance is low, a junction is shallow; the contact resistance between the electrode and a base body is low, and the saturated current density of the emission electrode is greatly reduced; and the short wave response of the solar cell is obviously improved, and open-circuit voltage and short-circuit current of the solar cell are improved.
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