Development of MOEMS Devices and Their Reliability Issues

It is believed that MOEMS along with the development of MEMS are expected to have a major impact on our lives, much like the way that the integrated circuit has affected information technology. Some typical MOEMS devices were introduced in this chapter. Their structure and mechanisms were briefly discussed. Some of the failure mechanisms of the MOEMS were also discussed. It is believed that MOEMS failure mechanisms studies and the development of novel stiction, friction, wear, and residual stress reduction techniques will become critical for commercialization of MOEMS.