Characterisation of a high-pressure direct-current magnetron discharge used for tungsten nanoparticle production

In this article, plasma parameters during tungsten nanoparticle growth in a high-pressure direct-current magnetron-sputtering discharge were studied over a wide range of gas pressures and discharge currents. Langmuir probe and optical emission spectroscopy measurements were performed. Correlation between nanoparticle size distribution and probe and spectroscopy measurements are discussed.