Chemical effects on ArF excimer laser irradiated surfaces of single crystalline lithium niobate

Abstract Single crystalline lithium niobate was irradiated by ArF excimer laser and the surface morphological changes were observed. It was found that various deffects occured in dependence on the laser beam energy density and the number of pulses. Delayed formation of microcracks was observed, which can be explained by the chemical reaction of LiNbO 3 with atmospheric water.