Old Web
English
Sign In
Acemap
>
Paper
>
Phase Stability of Amorphous Oxide Semiconductor In-Si-O Thin Films
Phase Stability of Amorphous Oxide Semiconductor In-Si-O Thin Films
2019
Tatsuki Hori
Ha Hong
Toshihide Nabatame
Kazuhito Tsukagoshi
Akihiko Fujiwara
Keywords:
Thin film
Oxide
Amorphous solid
Chemical engineering
Semiconductor
Materials science
oxide semiconductor
amorphous oxide semiconductor
phase stability
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]