Performance of Multilayer Array Analyzer Detector in the Intermediate Energy Region (1 KeV to 3 KeV)

It is natural to use multilayer analyzers as energy resolving x‐ray fluorescence detectors in the lower energy region. The analyzer array detectors can afford large detection solid angle, superb energy resolution, and reasonable efficiency. We have constructed a 12‐element multilayer detector for operation starting at about one KeV. The detection solid angle at 2 KeV is roughly 3 % of 4π. The FWHM of the detector response curve can reach 30 eV close to 1.2 KeV. The fabrication and testing of the prototype detector will lead to the design of better multilayer array analyzers in this energy region.