ORMOCER®s for Optical Interconnection Technology

New inorganic-organic hybrid polymers (ORMOCER®s) for integrated optical and opto-electronic devices were synthesized by sol-gel processing of functionalized alkoxysilanes. Process parameters (catalyst, temperature etc.) were optimized to achieve highly reproducible low cost materials which are photopatternable even in higher layer thickness (presently 100 μm within one step).