A 36-Channel SPAD-Integrated Scanning LiDAR Sensor with Multi-Event Histogramming TDC and Embedded Interference Filter

This paper presents a 36-channel scanning light detection and ranging (LiDAR) sensor with an on-chip single-photon avalanche diode (SPAD) array. The sensor has a 11b in-situ histogramming time-to-digital converter (hTDC) with a small area of 3000×78μm2/channel based on the mixed-signal accumulator. The sensor also employs an embedded interference (IF) filter for reliable direct time-of-flight (dTOF) measurement even if 32 different LiDARs interfere. The LiDAR system has a beam scanner that consists of dual laser diodes (LDs) for IF elimination and hybrid mirror such that high-resolution image of 2200 × 36 can be acquired with a wide field of view (FOV) of 120° × 8°.