Effects ofaloop arraylayer on amicro-inductor forfuture RFMEMS Components

Tunablemicro-inductors canbe designed controlling magneticcoupling coefficient. Thispaper presents theinductance variation produced byloops strongly magnetically coupledwitha micro-inductor. A compact lumpedelement model, basedonthegeometry, gives result in goodagreement withmeasurements intheRF frequency range. Then,thismodelwillbeapplied tothestudyofthe tunable MEMS inductor described below.