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The Destructive Effects to the RF Coupler by the Plasma Discharge
The Destructive Effects to the RF Coupler by the Plasma Discharge
2019
Andong Wu
Qingwei Chu
Hao Guo
Yuan He
Shichun Huang
Tiancai Jiang
Chunlong Li
Lin Zeqiang
Feng Pan
Yukun Song
Teng Tan
Weiming Yue
Shenghu Zhang
Hongwei Zhao
Keywords:
Plasma
Atomic physics
Coupling (electronics)
Materials science
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