Old Web
English
Sign In
Acemap
>
Paper
>
Low Frequency Noise Analysis of Impact of Metal Gate Processing on the Gate Oxide Stack Quality
Low Frequency Noise Analysis of Impact of Metal Gate Processing on the Gate Oxide Stack Quality
2018
C. Claeys
Liang He
B.J. O'Sullivan
A. Veloso
Naoto Horiguchi
Nadine Collaert
Eddy Simoen
Keywords:
Gate oxide
Metal gate
Analytical chemistry
Chemistry
Infrasound
Optoelectronics
Correction
Source
Cite
Save
Machine Reading By IdeaReader
43
References
5
Citations
NaN
KQI
[]