TES Bolometer Arrays for the QUBIC B-Mode CMB Experiment

2020 
QUBIC is a ground-based experiment aiming to measure the B-mode polarization of the cosmic microwave background. The developed instrument is an innovative two-frequency band bolometric interferometer that will operate at 300 mK with NbSi TES arrays. In this paper, we describe the fabrication process of the detectors.
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