The mechanical simulation of a special biosensor

Cantilever-based sensor is kind of the most popular MEMS sensor. In this paper, by taking an example the process of analyzing a transducer is explained, such as building models and performing mathematic operations on result data to get the performance parameters of a cantilever-based sensor. We also state the principle of the cantilever bio-sensor. In the meantime we explain the theory of the operating of cantilever, and a cantilever sensor design guided by mechanical simulation.