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Modelling of Materials for Silicon-Compatible Microelectronics
Modelling of Materials for Silicon-Compatible Microelectronics
2018
J. Dabrowski
P. Sana
G. Lippert
G. Kissinger
Grzegorz Lupina
T. Schroeder
M. Lukosius
Keywords:
Nanotechnology
Materials science
Microelectronics
Silicon
Compatibility (mechanics)
Correction
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