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Thermal Budget Reduction in Triple Gate Oxide Process by Wet Etch Technique
Thermal Budget Reduction in Triple Gate Oxide Process by Wet Etch Technique
2017
Hsin Tai
Hsin-Yi Liao
Hsin-An Chen
Pei Ting Tou
Wei-Ting Liu
Ming-Chen Lu
Tzung Hua Ying
Keywords:
Gate oxide
Thermal
Electronic engineering
Artificial intelligence
Materials science
Oxide
Optoelectronics
triple gate
Correction
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