Plasma-enhanced chemical vapor deposition of ZrF4-based fluoride glasses

Abstract A ZBLAN (ZrF 4 BaF 2 LaF 3 AlF 3 NaF) glass film is synthesized for the first time on the inner surface of a ZBLYAN (ZrF 4 BaF 2 LaF 3 YF 3 AlF 3 NaF) support tube. The maximum deposition rate is about 60 μm/h. The composition of the ZBLAN glass film is controlled with the vaporizing temperatures of the starting materials, but compositional distribution is observed along the preform axis. The thermal properties of the synthesized glass film are nearly the same as those of ZBLAN glass synthesized by the conventional melt-casting method.