High charge state ECR ion source-LECR3

A new Electron Cyclotron Resonance (ECR) ion source, which was named LECR3 (Lanzhou Electron Cyclotron Resonance ion source no. 3) and expected to provide highly charged ion beams for atomic physics research, has been constructed and under commissioning. The design of this ion source is based on the IMP 14.5GHz ECR ion source, which was named LECR2 (Lanzhou Electron Cyclotron Resonance ion source no. 2). In the new source it was desired with double RF heating by inserting waveguide directly and aluminum chamber. Furthermore, the volume of the plasma chamber is larger than that of LECR2 so as to increase the RF power and increase beam intensity for highly charged ions. But the hexapole field on the chamber wall is kept the same value in order to compare with the performance of LECR2 ion source. The results of this ion source are obviously better than LECR2. We obtained 780 emuA of O6+, 235emuA of O7+ and 240emuA of Ar11+ at 1100 watts of 14.5GHz RF power singly. Furthermore, in order to transmit the ion beams efficiently a new beam focusing and analyzing system was designed and constructed at the same time.