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Physics of corrosion-resistant Mg/SiC multilayer coatings for EUV sources
Physics of corrosion-resistant Mg/SiC multilayer coatings for EUV sources
2015
Regina Soufli
Mónica Fernández-Perea
Christopher C. Walton
Manuela Vidal-Dasilva
Jeff C. Robinson
Sherry L. Baker
Jennifer B. Alameda
Luís Rodríguez de Marcos
José A. Méndez
Juan I. Larruquert
Eric M. Gullikson
Keywords:
Corrosion
Metallurgy
Cartography
Physics
Extreme ultraviolet lithography
corrosion resistant
Correction
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