The dynamics of a vibrating silicon diaphragm microgyroscope

AbstractThis paper describes the principal features of a microgyroscope bulk machined from a [100] silicon wafer by chemical etching. The equations of motion of the gyroscope are derived and the factors that determine both the mechanical and electrical characteristics of the device are identified. The response to constant and harmonic rates of turn is evaluated for both tuned and untuned gyros. Gyro performance is shown to depend upon the relationship between the mistuning of the primary and secondary modes and the secondary mode damping factor.