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Impact of heating rate during the melting process for poly-silicon on carbon concentration in Czochralski silicon crystals
Impact of heating rate during the melting process for poly-silicon on carbon concentration in Czochralski silicon crystals
2019
Kazuma Takahashi
Hiroyuki Tsubota
Yuta Nagai
Yoshiaki Abe
Hisashi Matsumura
Keywords:
Chemical engineering
Carbon
Crystal growth
Materials science
Crystal
Silicon
Correction
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