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Acemap > Paper > Micro mirror unit with a mirror substrate and separated therefrom by a conductive spacer wiring substrate

Micro mirror unit with a mirror substrate and separated therefrom by a conductive spacer wiring substrate

2003

Norinao c
o Fujitsu Limited Kawasaki-shi Kouma
Yoshihiro c
o Fujitsu Limited Kawasaki-shi Mizuno
Yoshitaka Nakamura
Hisao c
o Fujitsu Limited Kawasaki-shi Okuda
Ippei c
o Fujitsu Limited Kawasaki-shi Sawaki
Hiromitsu c
o Fujitsu Limited Kawasaki-shi Soneda
Osamu c
o Fujitsu Limited Kawasaki-shi Tsuboi
Satochi c
o Fujitsu Limited Kawasaki-shi Ueda
Fumio Susuka-shi Yamagishi

Keywords:

Optoelectronics
Substrate (chemistry)
Materials science
Electrical conductor
micro mirror

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