A method for the synthesis of submicron particles

1987 
Powder synthesis by thermally induced vapor-phase reactions in aerosol reactors is described. The powders generated by this technique consist of high-purity, spherical, nonagglomerated, and uniformly sized particles in the 0.1-µm size range. Most of the particles are crystalline spheres. A theoretical examination based on the discrete-sectional model is presented. The comparison shows that the calculated size distribution of the final product from the aerosol reactor is fairly consistent with that observed experimentally.
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