Resistivity stability for polymer modified by metal ion implantation

Polyethylene terephthalate (PET) has been modified by metal ion implantation with a dose range from 1/spl times/10/sup 16/ to 2/spl times/10/sup 17/ ions/cm/sup 2/ using a metal vapor vacuum arc (MEVVA) source. The resistivity of implanted PET decreased obviously with an increase of ion dose. When the metal ion dose of 2/spl times/10/sup 17/ cm/sup -2/ was selected, the resistivity of PET could be less than 0.1 /spl Omega/M. The results show that the conductive behavior of a metal ion implanted sample is obviously different from nonmetal ion-implantation one. The resistivity of metal ion implanted polymer is very stable. The resistivity slightly changes when retention time of the implanted PET is over 1000 days. The three-layer structure appears and it is believed that the change would cause the improvement of the properties. The modification mechanism of PET is discussed.