Experimental study of the multi-tip field emitter based on the array of silicon pyramidal microstructures

The paper presents a multiparameter experimental study of the multi-tip field emitter based on the array of silicon pyramidal microstructures. Emitter was created using standard silicon microfabrication process. Sample measurement was performed using computerized method with online processing of the field emission data. Obtained experimental current-voltage characteristics demonstrate good agreement with the expected theoretical estimates of the field-emission current.