A Multilayer-Based High-Performance Multisubpart Profile Grating Reflector

In this letter, a multilayer-based high-performance subwavelength multisubpart profile grating reflector (MPGR) is proposed and fabricated. The properties of the reflector are investigated by rigorous coupled-wave analysis for multilayered grating structures. It is shown that with the properly configured profile and strongly modulated grating layer in transverse-electric polarized wave, the MPGR experimentally demonstrates a broadband reflection spectrum from 1.56 to 1.8 ?m, very high reflectivity (>97%), and good angular insensitivity of about 27.8°.