A process for preparing X-ray optical gratings, X-ray optical grid and X-ray system

2008 
A process for preparing X-ray optical gratings for X-ray imaging and dark field for the x-ray phase contrast imaging, wherein: 1.1. an x-ray sensitive layer with an electrically conductive layer is applied on a base plate, 1.2. a grating structure is transferred to the X-ray sensitive layer by a lithographic process, wherein exposed and unexposed areas are created, 1.3. the exposed areas of the X-ray sensitive layer is dissolved out so that a lattice structure remains, 1.4. a metal is introduced into the lattice interstices by electroplating, 1.5. after detachment of the X-ray sensitive material and the base plate, there remains a negative impression of a grid made of metal, 1.6. a grating is made of a first material having this negative imprint, wherein 1.7. having a plurality of periodically arranged grating bars, and vacancies, this grating and 1.8. the lattice gaps are filled by electroplating with a second material, characterized in that 1.9. electroplating is continued until above the grid bars (4) ...
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