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A High Stability Electrode Technology for Stacked SrBi2Ta209 Capacitors Applicable to Advanced Ferroelectric Memory
A High Stability Electrode Technology for Stacked SrBi2Ta209 Capacitors Applicable to Advanced Ferroelectric Memory
1997
Junya Kudo
Yoichiro Ito
Shun Mitarai
Norihiro Ogata
Shinobu Yamazaki
H. Urashima
Akira Okutoh
Masayoshi Nagata
Kazuya Ishihara
Keywords:
Electronic engineering
Capacitor
Ferroelectric capacitor
Electrode
Ferroelectricity
Materials science
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