SixGey:H-based micro-bolometers studied in the terahertz frequency range

Abstract SiGe-based bolometers originally designed for infrared operation have been tested as detectors of terahertz radiation. The obtained values of the responsivity and noise equivalent power show that these detectors can compete with conventional room temperature detectors such as pyroelectric detectors and Golay cells having an advantage in their compatibility with the CMOS technology.