Mass production of sensors grown by MBE

We have discussed mass production of magnetic sensors and infrared sensors using narrow-bandgap compound semiconductor materials such as InSb, InAs and related antimonides grown by MBE. We showed that MBE system is suitable for the mass production of these sensors. The Hall sensors produced by MBE are widely used for various electric apparatuses, mobile phones, digital cameras and automobile applications. Moreover, we have succeeded in developing a miniaturised InSb photovoltaic infrared sensor operating at room temperature. The InSb photovoltaic infrared sensor grown by MBE was encapsulated in a very small plastic package. Our InSb photovoltaic infrared sensor, with its high sensitivity, ease of manufacture and millimetre dimensions, is a promising device for both noncontact thermometry and human body detection in portable device applications.