A 2D Finite Element Analysis for the Modeling of rf Plasma Devices Fed by Voltage Driven Coil

Abstract An axially symmetric finite element analysis is carried out to compute the eddy current as well in the plasma as in the voltage driven coil of an RF plasma torch. The model allows the calculation of the plasma impedance and the inductor current. On the other hand, the effect of the plasma temperature and fluid flow, on the electric behaviour of the plasma is taken into account within the determination of the plasma electric conductivity.