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E-MRS 2008 Spring Conference Symposium J: Beyond Silicon Technology: Materials and Devices for Post-Si CMOS
E-MRS 2008 Spring Conference Symposium J: Beyond Silicon Technology: Materials and Devices for Post-Si CMOS
2008
Cor Claeys
Tony Peaker
Jean Fompeyrine
Martin Frank
Jan Vanhellemont
Keywords:
Nanotechnology
CMOS
Physics
Silicon
Engineering physics
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