Size Control of Crystalline Germanium Nanoparticles Using Inductively Coupled Nonthermal Plasma

Catholic University of Daegu, 13 13 Hayang-ro, Hayang-eup, Gyeongsan-si, Gyeongbuk 712-702, KoreaInductively coupled nonthermal plasma has been utilized to synthesize size-tunable germaniumnanoparticles (Ge NPs). Process pressure and radio-frequency (RF) power were modulated toinvestigate their effects on the size distribution of the synthesized Ge NPs. The size of the NPs wasdetermined using transmission electron microscope (TEM) images. X-ray diffraction (XRD) analysesand Raman spectroscopy measurements were utilized to con“rm the crystallinity of the synthesizedGe NPs. The consistency between the XRD analysis and the diffraction patterns from the TEManalysis indicated that the synthesized the Ge NPs were crystalline. Ge NPs with a mean diameterof less than 10 nm can be synthesized under proper experimental conditions.