Novel prediction methodology for etched hole patterning failure
2012
We have created a model that uses discriminant function analysis to predict failures in etched hole patterning of the type
that induces an open-contact failure by using critical dimension scanning electron microscope (CDSEM) measurement
values of after-development resist hole patterning. The input variables of the best model were found to be the resist hole
CD, the difference in resist hole CD between that of the 50% secondary electron (SE) threshold and that of the 20% SE
threshold, and ellipticity. The model indicates that a tapered resist profile is one of the main causes of the open-contact
failure in etched hole patterning. The model is applicable not only to lithography process optimization but also to
lithography process control, where the focus center of optical exposure at resist patterning is determined not only from
the perspective of resist CD but also from the perspective of suppressing the failures of etched hole patterning.
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