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Deposition of ZrO 2 film by liquid phase deposition
Deposition of ZrO 2 film by liquid phase deposition
2006
Jain-Ming Lin
Ming-Chi Hsu
Kuan Zong Fung
Keywords:
Ion plating
Thin film
Deposition (phase transition)
Chemistry
Combustion chemical vapor deposition
Atomic layer deposition
Inorganic chemistry
Pulsed laser deposition
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